Cathodoluminescence combines the spatial resolution of an electron microscope with full optical spectroscopy, mapping the luminescence of a sample far below the optical diffraction limit. NewRoad supplies HORIBA cathodoluminescence detection systems and spectrometers that attach to existing SEM platforms.
A focused electron beam excites the sample and generates electron-hole pairs. Their radiative recombination emits photons, which are collected by a mirror and directed into a spectrometer and detector. Scanning the beam builds hyperspectral maps that correlate composition, defects and strain with position on the sample.
